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Review on the progress of ultra-precision machining technologies

Julong YUAN, Binghai LYU, Wei HANG, Qianfa DENG

《机械工程前沿（英文）》 2017年第12卷第2期页码 158-180 doi: 10.1007/s11465-017-0455-9

摘要：

Ultra-precision machining technologies are the essential methods, to obtain the highest form accuracy and surface quality. As more research findings are published, such technologies now involve complicated systems engineering and been widely used in the production of components in various aerospace, national defense, optics, mechanics, electronics, and other high-tech applications. The conception, applications and history of ultra-precision machining are introduced in this article, and the developments of ultra-precision machining technologies, especially ultra-precision grinding, ultra-precision cutting and polishing are also reviewed. The current state and problems of this field in China are analyzed. Finally, the development trends of this field and the coping strategies employed in China to keep up with the trends are discussed.

关键词： ultra-precision grinding ultra-precision cutting ultra-precision polishing research status in China development tendency

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Research progress on ultra-precision machining technologies for soft-brittle crystal materials

Hang GAO,Xu WANG,Dongming GUO,Yuchuan CHEN

《机械工程前沿（英文）》 2017年第12卷第1期页码 77-88 doi: 10.1007/s11465-017-0411-8

摘要：

Soft-brittle crystal materials are widely used in many fields, especially optics and microelectronics. However, these materials are difficult to machine through traditional machining methods because of their brittle, soft, and anisotropic nature. In this article, the characteristics and machining difficulties of soft-brittle and crystals are presented. Moreover, the latest research progress of novel machining technologies and their applications for soft-brittle crystals are introduced by using some representative materials (e.g., potassium dihydrogen phosphate (KDP), cadmium zinc telluride (CZT)) as examples. This article reviews the research progress of soft-brittle crystals processing.

关键词： brittle soft functional crystal ultra-precision machining

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Special issue: Ultra-precision machining

Zhuangde JIANG,Dongming GUO

《机械工程前沿（英文）》 2017年第12卷第1期页码 1-2 doi: 10.1007/s11465-017-0445-y

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Development and application prospects of piezoelectric precision driving technology

ZHAO Chunsheng, ZHANG Jiantao, ZHANG Jianhui, JIN Jiamei

《机械工程前沿（英文）》 2008年第3卷第2期页码 119-132 doi: 10.1007/s11465-008-0034-1

摘要： With the rapid development of science and technology, microelectronics manufacturing, photonics technology, space technology, ultra-precision machining, micro-robotics, biomedical engineering and other fields urgently need the support of modern precision driving theory and technology. Modern precision driving technology can be generally divided into two parts: electromagnetic and non-electromagnetic driving technology. Electromagnetic driving technology is based on traditional technology, has a low thrust-weight ratio, and needs deceleration devices with a cumbrous system or a complex structure. Moreover, it is difficult to improve positioning accuracy with this technology type. Thus, electromagnetic driving technology is still unable to meet the requirements for the above applications. Non-electromagnetic driving technology is a new choice. As a category of non-electromagnetic driving technology, piezoelectric driving technology becomes an important branch of modern precision driving technology. High holding torque and acute response make it suitable as an accurate positioning actuator. This paper presents the development of piezoelectric precision driving technology at home and abroad and gives an in-depth analysis. Future perspectives on the technology’s applications in the following fields are described: 1) integrated circuit manufacturing technology; 2) fiber optic component manufacturing technology; 3) micro parts manipulation and assembly technology; 4) biomedical engineering; 5) aerospace technology; and 6) ultra-precision processing technology.

关键词： Electromagnetic ultra-precision processing technology piezoelectric cumbrous

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Model reduction techniques for dynamics analysis of ultra-precision linear stage

Xuedong CHEN, Zhixin LI

《机械工程前沿（英文）》 2009年第4卷第1期页码 64-70 doi: 10.1007/s11465-009-0009-x

摘要： Spring-damping elements are used to simplify the internal interaction in the proposed finite element (FE) model of an ultra-precision linear stage. The dynamics behavior is studied. The comparison between mode shapes from the eigenvalue analysis shows that the components, except the translator, can represent system dynamics characteristics. A reduction approach is used to simplify the system in a dynamic studied. There is little difference between the vibration mode and the response analysis. The experimental modal analysis proves the validity of the reduction approach, which can be generalized to the development and dynamics characteristic study of a complex system model to obviously save computational resource.

关键词： dynamics analysis air-bearing linear stage reduction

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Advances in molecular dynamics simulation of ultra-precision machining of hard and brittle materials

Xiaoguang GUO,Qiang LI,Tao LIU,Renke KANG,Zhuji JIN,Dongming GUO

《机械工程前沿（英文）》 2017年第12卷第1期页码 89-98 doi: 10.1007/s11465-017-0412-7

摘要：

Hard and brittle materials, such as silicon, SiC, and optical glasses, are widely used in aerospace, military, integrated circuit, and other fields because of their excellent physical and chemical properties. However, these materials display poor machinability because of their hard and brittle properties. Damages such as surface micro-crack and subsurface damage often occur during machining of hard and brittle materials. Ultra-precision machining is widely used in processing hard and brittle materials to obtain nanoscale machining quality. However, the theoretical mechanism underlying this method remains unclear. This paper provides a review of present research on the molecular dynamics simulation of ultra-precision machining of hard and brittle materials. The future trends in this field are also discussed.

关键词： MD simulation ultra-precision machining hard and brittle materials machining mechanism review

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Air-bearing position optimization based on dynamic characteristics of ultra-precision linear stages

CHEN Xuedong, LI Zhixin

《机械工程前沿（英文）》 2008年第3卷第4期页码 400-407 doi: 10.1007/s11465-008-0060-z

摘要： Air-bearings are installed between the stator and the mover of ultra-precision linear stages to suppress vibration and mechanical contact. Spring-damping elements are used to emulate the complex interaction of the finite element model (FEM) developed in this paper and the system dynamic behaviors are analyzed. Through the experimental modal test, the validity and reliability of the model are proven. However, the dynamic characteristics including mode frequency, mode shape, and response amplitude are obviously changed with the position of air-bearings. The combined optimization method is used to optimize the air-bearings position. The best and worst positions are obtained using the dynamic characteristic analysis. The method can be generalized to the connection position of different components in manufacture elements and to implement the system dynamic characteristics optimization when the connection position can be changed.

关键词： manufacture different interaction air-bearings response amplitude

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Full-band error control and crack-free surface fabrication techniques for ultra-precision fly cutting

F. H. ZHANG, S. F. WANG, C. H. AN, J. WANG, Q. XU

《机械工程前沿（英文）》 2017年第12卷第2期页码 193-202 doi: 10.1007/s11465-017-0448-8

摘要：

Large-aperture potassium dihydrogen phosphate (KDP) crystals are widely used in the laser path of inertial confinement fusion (ICF) systems. The most common method of manufacturing half-meter KDP crystals is ultra-precision fly cutting. When processing KDP crystals by ultra-precision fly cutting, the dynamic characteristics of the fly cutting machine and fluctuations in the fly cutting environment are translated into surface errors at different spatial frequency bands. These machining errors should be suppressed effectively to guarantee that KDP crystals meet the full-band machining accuracy specified in the evaluation index. In this study, the anisotropic machinability of KDP crystals and the causes of typical surface errors in ultra-precision fly cutting of the material are investigated. The structures of the fly cutting machine and existing processing parameters are optimized to improve the machined surface quality. The findings are theoretically and practically important in the development of high-energy laser systems in China.

关键词： ultra-precision fly cutting large-aperture KDP crystals spatial frequency processing error

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Electrorheological damper for the ultra-precision air bearing stage

ZHU Yu, JIA Songtao, CHEN Yaying, LI Guang

《机械工程前沿（英文）》 2008年第3卷第2期页码 158-163 doi: 10.1007/s11465-008-0031-4

摘要： This paper illustrates how the electrorheological damper substantially improves the performance of the ultra-precision air bearing stage. Smart materials such as electrorheological fluids have attracted many researchers’ attention because of their resistance changeable performance in different electric fields. Meanwhile, the ultra-precision air bearing stage driven by the linear-motor is characterized by zero mechanical damping and poor anti-disturbance. To solve this problem and consider the characteristics of electrorheological fluids, an electrorheological damper is proposed in this paper. The electrorheological damper’s characteristics in high electric fields are obtained based on the Eyring constitutive model, which smoothly transits from the pre-yield to post-yield region. To enhance the performance of the electrorheological damper, which takes effect only when the stage is going to decelerate or position, the on-off and sliding mode control methods design and optimize the controller. The results prove that by using the advanced sliding mode control method, the characteristics of the ultra-precision air bearing stage can be effectively improved through the introduction of the electrorheological damper.

关键词： post-yield linear-motor advanced sliding pre-yield position

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高端光学元件超精密加工技术与装备发展研究

蒋庄德, 李常胜, 孙林, 段端志, 康城玮, 陈杉杉, 林启敬, 杨树明

《中国工程科学》 2023年第25卷第1期页码 131-141 doi: 10.15302/J-SSCAE-2023.07.003

摘要：

高端光学元件是决定高端装备性能水平的核心零件，研究高端光学元件超精密加工技术与装备发展，对于实施制造强国战略、满足高端装备产业需求具有积极意义。本文剖析了光学元件超精密加工方法与装备、高性能基础部件、超精密光学加工中的测量方法与装备等的发展情况，凝练了精度与尺寸极端化、形状与性能一体化、加工工艺复合化、加工与检测一体化、装备与工艺智能化等发展趋势。通过广泛的行业调研和研讨，从需求、目标、产品、关键技术、应用示范、支撑保障等层次着手，形成了面向2035 年我国高端光学元件超精密制造技术路线图。针对性提出了优化创新体系设置、组织优势资源成立技术联盟，加大资源保障力度、布局基础研究和技术攻关计划，加强人才培育、构建梯队并扩大队伍规模，筑牢产业发展基础、培育龙头企业和专精特新“小巨人”企业等发展建议，以期促进高端光学元件加工产业提升与高质量发展。

关键词：光学元件；精密制造；超精密机床；超精密加工；光学加工

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Ultra-precision ductile grinding of BK7 using super abrasive diamond wheel

ZHAO Qingliang, Brinksmeier Ekkard, Riemer Oltmann, Rickens Kai

《机械工程前沿（英文）》 2007年第2卷第3期页码 350-355 doi: 10.1007/s11465-007-0061-3

摘要： In this paper, a novel conditioning technique using copper bonded diamond grinding wheels of 91 yD grain size and electrolytic in-process dressing (ELID) is first developed to precisely and effectively condition a nickel-electroplated monolayer coarse-grained diamond grinding wheel of 151 μm grain size. Under optimised conditioning parameters, the super abrasive diamond wheel was well conditioned in terms of a minimized run-out error and flattened diamond grain surfaces of constant peripheral envelope. The conditioning force was monitored by a force transducer, while the modified wheel surface status was in-situ monitored by a coaxial optical distance measurement system. Finally, the grinding experiment on BK7 was conducted using the well-conditioned wheel with the corresponding surface morphology and subsurface damage measured by atomic force microscope (AFM) and scanning electric microscope (SEM), respectively. The experimental result shows that the newly developed conditioning technique is applicable and feasible to ductile grinding optical glass featuring nano scale surface roughness, indicating the potential of super abrasive diamond wheels in ductile machining brittle materials.

关键词： ELID peripheral electrolytic in-process nickel-electroplated monolayer measurement

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超大型薄壁沉井钢壳加工和精度控制

彭武,林帆,赵强,马建磊

《中国工程科学》 2010年第12卷第4期页码 21-24

摘要：

论述了对泰州长江公路大桥超大型薄壁钢壳沉井加工工艺和焊接工艺的合理选择，针对钢壳沉井外形尺寸大、壁薄的特点，采用了合理的焊接、拼装方法，使单元件加工、各单元件组装和整体拼装过程的精度，以及对薄壁钢板的焊接和防变形的精度得到有效控制，从而保证加工质量。

关键词：超大型薄壁钢壳沉井加工精度控制

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超短脉冲激光制造及表面加工微米器件 Review

于泳超, 白石, 王树同, 胡安明

《工程（英文）》 2018年第4卷第6期页码 779-786 doi: 10.1016/j.eng.2018.10.004

摘要：

超短脉冲激光在材料加工方面具有独特的优势。其对焦点之外区域的热影响效应非常有限，使超短脉冲激光可被应用于微米甚至纳米尺寸的精密加工。另外，非线性多光子效应使超短脉冲激光可以加工多种透明材料，包括玻璃以及透明高分子材料。基于这些特点，我们利用激光直写技术在高分子衬底上成功制造出了具有三维（3D）结构的高性能微型超级电容器（MSC），在0.1 mA·cm^–2的电流密度下表现出42.6 mF·cm^–2的峰值比电容。同时，也制造出了可用于探测多种“味道”的柔性传感器阵列。对传感器电极表面进行了不同的处理，如镀金、沉降氧化石墨烯（rGO）以及沉积聚苯胺（PANI）。通过对采集的数据进行主成分分析（PCA），这一传感器阵列可以成功地检测出样品内的不同物质。另外，在3D 结构玻璃微流体通道内由全飞秒激光加工出了具有2D周期性结构的纳米金属表面，可用于实时表面增强拉曼散射（SERS）的检测。全飞秒激光加工过程包括激光烧蚀、激光还原和激光诱导表面纳米工程。这些工作证明了超短脉冲激光在表面精密加工中的巨大潜力。

关键词：超短脉冲激光加工微米器件超级电容器电子舌表面增强拉曼光谱

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Processing of high-precision ceramic balls with a spiral V-groove plate

Ming FENG,Yongbo WU,Julong YUAN,Zhao PING

《机械工程前沿（英文）》 2017年第12卷第1期页码 132-142 doi: 10.1007/s11465-017-0436-z

摘要：

As the demand for high-performance bearings gradually increases, ceramic balls with excellent properties, such as high accuracy, high reliability, and high chemical durability used, are extensively used for high-performance bearings. In this study, a spiral V-groove plate method is employed in processing high-precision ceramic balls. After the kinematic analysis of the ball-spin angle and enveloped lapping trajectories, an experimental rig is constructed and experiments are conducted to confirm the feasibility of this method. Kinematic analysis results indicate that the method not only allows for the control of the ball-spin angle but also uniformly distributes the enveloped lapping trajectories over the entire ball surface. Experimental results demonstrate that the novel spiral V-groove plate method performs better than the conventional concentric V-groove plate method in terms of roundness, surface roughness, diameter difference, and diameter decrease rate. Ceramic balls with a G3-level accuracy are achieved, and their typical roundness, minimum surface roughness, and diameter difference are 0.05, 0.0045, and 0.105 mm, respectively. These findings confirm that the proposed method can be applied to high-accuracy and high-consistency ceramic ball processing.

关键词： bearing ceramic ball spiral V-groove kinematic analysis trajectory

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Feature extraction of hyperspectral images for detecting immature green citrus fruit

Yongjun DING, Won Suk LEE, Minzan LI

《农业科学与工程前沿（英文）》 2018年第5卷第4期页码 475-484 doi: 10.15302/J-FASE-2018241

摘要：

At an early immature growth stage of citrus, a hyperspectral camera of 369–1042 nm was employed to acquire 30 hyperspectral images in order to detect immature green fruit within citrus trees under natural illumination conditions. First, successive projections algorithm (SPA) were implemented to select 677, 804, 563, 962, and 405 nm wavebands and to construct multispectral images from the original hyperspectral images for further processing. Then, histogram threshold segmentation using NDVI of 804 and 677 nm was implemented to remove image backgrounds. Three slope parameters, calculated from the pairs 405 and 563 nm, 563 and 677 nm, and 804 and 962 nm were used to construct a classifier to identify the potential citrus fruit. Then, a marker-controlled watershed segmentation based on wavelet transform was applied to obtain potential fruit areas. Finally, a green fruit detection model was constructed according to Grey Level Co-occurrence Matrix (GLCM) texture features of the independent areas. Three supervised classifiers, logistic regression, random forest and support vector machine (SVM) were developed using texture features. The detection accuracies were 79%, 75%, and 86% for the logistic regression, random forest, and SVM models, respectively. The developed algorithm showed a great potential for identifying immature green citrus for an early yield estimation.

关键词： hyperspectral green citrus image processing fruit detection precision agriculture yield mapping